2 - [2017]797 2017 10 A 1,889 1 19.47 36,778.83 34,028.83 32,875.52 [2017]3930 2019 12 6 1 Q4 13,300.00 12,637.76 2 5,200.00 5,200.00 40 3 21,200.00 14,936.72 PECVD 4 10,500.00 101.04 5 5,200.00 - 55,400.00 32,875.52 1688 B 1 2 2020 5 22 2013 2